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No. P-202407030002

Acme Chemical Vapor Deposition CVD Furnace Silicon Carbide Coating CVD Equipment Customizable

Supplier
Origin
China
Loading Country
China
HS Code
8514199000
MOQ
1 / Unit
Incoterms
FOB
Lead Time
Negotiable

Product Image

Payment
T/T
Quantity
Unit
Price
$ 200,000.00 - $ 800,000.00 / Unit

Furnace is used for material CVD/CVI treatment by using hydrocarbon gases (like C3H6,CH4 ) .  It has both horizontal and vertical structures.


Model NO.
HCVD-252035-C
Type
Industrial Furnace
Usage
Crucible
Fuel
Electric
Working Zone Size
2500×2000×3500
Max. Temperature (°c)
1500
Temperature Uniformity(°c)
±10
Ultimate Vacuum (PA)
1-100
Pressure Increase Rate(PA/H)
0.67
Furnace Door
Screw/Hydraulic/Manual Elevation Type; Swing Openi
Furnace Vessel
All Carbon Steel/Inner Layer Stainless Steel/All S
Furnace Hot Zone
Soft Carbon Felt/Soft Graphite Felt/Rigid Composit
Heating Element and Muffle
Isostatic Press Graphite/High Purity, Strength and
Process Gas System
Volume/Mass Flow-Meter;
Thermocouple
K Type/N Type/C Type/S Type
Transport Package
Wooden Box
Specification
2500× 2000× 3500
Trademark
ACME
Origin
China
HS Code
8514199000
Production Capacity
50 Sets/Year





























Acme Chemical Vapor Deposition CVD Furnace Silicon Carbide Coating CVD Equipment CustomizableAcme Chemical Vapor Deposition CVD Furnace Silicon Carbide Coating CVD Equipment CustomizableAcme Chemical Vapor Deposition CVD Furnace Silicon Carbide Coating CVD Equipment CustomizableAcme Chemical Vapor Deposition CVD Furnace Silicon Carbide Coating CVD Equipment CustomizableAcme Chemical Vapor Deposition CVD Furnace Silicon Carbide Coating CVD Equipment Customizable



A photo of Acme Chemical Vapor Deposition CVD Furnace Silicon Carbide Coating CVD Equipment CustomizableA photo of Acme Chemical Vapor Deposition CVD Furnace Silicon Carbide Coating CVD Equipment Customizable




Product specification

The parameters can be adjusted according to the process requirements, but not as the acceptance standard. The detailed specifications will be described in the technical proposal and agreement.

Model/Spec

Working Zone Size

(W × H × L) (mm)

Max. Temperature (°C)

Temperature Uniformity(°C)

Ultimate  Vacuum  (Pa)

Pressure Increase  Rate(Pa/h)

HCVD-060609-C600 × 600 × 9001500±7.51-1000.67
HCVD-101015-C1000 × 1000 × 15001500±7.51-1000.67
HCVD-121220-C1200×1200×20001500±101-1000.67
HCVD-151530-C1500×1500×30001500±101-1000.67
HCVD-152023-C1500×2000×23001500±101-1000.67
HCVD-252035-C2500×2000×35001500±101-1000.67
 
VCVD-0305-Cφ300×5001500±5/±101-1000.67
VCVD-0608-Cφ600×8001500±7.5/±101-1000.67
VCVD-0812-Cφ800×12001500±7.5/±151-1000.67
VCVD-1120-Cφ1100×20001500±10/±151-1000.67
VCVD-1320-Cφ1300×20001500±10/±151-1000.67
VCVD-1520-Cφ1500×20001500±10/±201-1000.67
VCVD-1822-Cφ1800×22001500±151-1000.67
VCVD-2032-Cφ2000×32001500±151-1000.67
VCVD-2632-Cφ2600×32001500±151-1000.67
VCVD-3338-Cφ3300×38001500±201-1000.67
VCVD-3344-Cφ3300×44001500±201-1000.67

 

Technical Features

1.  Using multiple temperature control zones, great temperature uniformity;

2.  Special designed deposition chamber with good sealing effect and great anti-contamination performance;

3.  Using multiple deposition channels with uniformity gas flow, without deposition dead corner and perfect deposition surface;

4.  It has treatment for the tar, solid dust and organic gases during the deposition process
 

Optional Configuration

1.  Furnace door: screw/hydraulic/manual elevation type; swing opening/parallel opening(large size furnace door); manual tight/auto lock-ring tight

2.  Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel

3.  Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/ CFC

4.  Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite

5.  Process gas system: volume/mass flow-meter;

6. Thermocouple: K type/N type/C type/S type

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